Operation

 Manual / Pneumatic

 Flange Type

 ISO / JIS / ASA / CF

 Feedthough

 Welded Bellows

 Gate Seal

 Viton O-Ring   / Kalrez O-Ring

 Bonnet Seal

 Viton O-ring  / Cu Gasket 

 Response Time

 ≤ 2 Sec

 Operate Pressure Range

 1 Ⅹ 10-9 Torr

 Leak Rate 

 < 1 Ⅹ 10-9 TORR.ℓ/Sec

 Cycles Until First Service

 100,000 Cycles

 Temperature For Valve Body

 ≤ 200

 Materials

 Stainless Steel 304 / AL6061 Anodizing

 Operating Pressure(N2)

 4-7Kgf/cm2