[Serise] SLA5800 Serise
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2021.05.18 06:41
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PDF #1 파일 : Brooks SLA5800.pdf (1.9M)
최종수정일 : 2021-05-18 06:41:58
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Digital Thermal Mass Flow Controller/ Meter [0.003 to 50 SLPM]
- SPECIFICATIONS
Model | SLA5850 (Controller) | SLA5860 (Meter) |
Flow Range (lpm) | 0.003 - 50 (N2) | |
Max. Pressure (bar) | 100 (310 Option) | |
Accurcy (%) | ±0.18% of F.S. (<20% F.S) | |
Response Time (sec) | < 1 | |
Temperature Range (℃) | -14 to 65 | |
Signal In/ Out | 0-5V, 4-20mA | |
Interface | RS485, Profibus®, DeviceNetTM, EtherCAT® | |
Fitting | 1/4", 3/8" LOK or VCR | |
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