[Serise] GF Serise
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2021.05.18 06:46
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PDF #1 파일 : Brooks GF Serise.pdf (2.7M)
최종수정일 : 2021-05-18 06:46:55
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High Purity Digital Thermal Mass Flow Controller [0.003 to 55 SLPM]
- SPECIFICATIONS
Model | GF100 | GF120 | GF125 |
Flow Range (lpm) | 0.003 - 55 (N2) | ||
Max. Operating Pressure (bar) | 35 | 7 | |
Accuracy (%) | ±1 S.P. > 35-100%, ±0.35% F.S. 2-35% | ||
Response Time | < 1 sec | 700 ms | 300 - 700 ms |
Digital Communication | RS485, DeviceNet Etc.. | ||
MultiFlo | Standard | ||
Temperature Range (℃) | 10 - 50 | ||
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