[XDC] XDC/M1
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2021.05.18 13:58
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PDF #1 파일 : XDC-M1-HP-NEWNCover.pdf (708.4K)
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Thin Film Thickness Monitor
- SPECIFICATIONS
Crystal Range & Precision | 6.0 to 5.0 MHz |
Thickness Accuracy | 0.5 % |
Inputs | 4 Defined TTL/CMOS Compatible or Closure to GND |
Outputs | 4 Single Pole Closing Contacts (Relays), 2.5A @120V |
Thickness Resolution | 1Å |
Rate Resolution | 0.1Å for 1 to 99.9 Å/s / 1Å for 100 to 999 Å/s |
Film Parameter | 9 Materials |
Hardware Interface | RS232 |
Sensors | 1 |
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