[XDC] XDC/K1
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PDF #1 파일 : XDC-K1BR.pdf (412.4K)
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Thin Film Thickness Rate Controller
- SPECIFICATIONS
Crystal Range & Precision | 6.0 to 5.0 MHz ± 0.5 Hz (per 250ms sample) |
Thickness Accuracy | 0.5 % |
Inputs | 8 Defined TTL/CMOS Compatible or Closure to GND |
Outputs | 12 Single Pole Closing Contacts (Relays), 2.5A @120V |
Resolution for Film Thickness & Deposition Rate | 0.0617 (per 250ms sample) |
Thickness Resolution | 1Å |
Rate Resolution | 0.1Å for 1 to 99.9 Å/s / 1Å for 100 to 999 Å/s |
Thin Film Process | 9 |
Process Layers | 3 |
Sensors | Single=2, Dual=1, Six Crystal=2 |
Interface | RS232C (Standard) |
Crucible Positions | 8 |
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