[XTC] XTC-3
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2021.05.18 14:30
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PDF #1 파일 : XTC-3.pdf (479.1K)
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Thin Film Thickness Rate Controller
- SPECIFICATIONS
Model | XTC/3S Single Layer | XTC/3M Multiple Layer |
Frequency Resolution | ± 0.028 Hz @ 6 MHz | |
Measurement Frequency Range | 6.0 to 5.0 MHz (Fixed) | |
Thickness and Rate Resolution | ± 0.034 Å | |
Measurement Technology | ModeLock | |
Number of Processes | One | 99 |
Number of Layers | One | 999 |
Number of Material Programs | Nine | 32 |
Number of Sensor Inputs | Two | |
Communications | RS-232 Standard, Ethernet TCP/IP Optional | |
Film Select Via Inputs | Yes | No |
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